The precision of thermoelectric Type, Refrigerant Type

• Small Footprint
• Temperature control with high accuracy
• High MTBF
• Leakage Detection Function, touch Screen
• Leakage current monitoring

Chiller is one of the most important equipment of an etching & CVD equipment to keep the temperature of wafer & chamber stable at certain level.
Especially, LABTECH have two type chiller, compressor type chiller & unlikely from conventional compressor type chiller, operates by the Thermoelectric module which provides Solid State cooling. This is the equipment with high accuracy and high reliability.